دورية أكاديمية
The influence of vapor phase cleaning on the composition and the surface roughness of rapid thermal oxides and nitrided oxides
| العنوان: | The influence of vapor phase cleaning on the composition and the surface roughness of rapid thermal oxides and nitrided oxides |
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| المؤلفون: | Sacher, N., Froeschle, B., Glowacki, F. |
| المصدر: | Journal of Electronic Materials. December 1999 28(12):1365-1369 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 03615235 1543186X |
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| DOI: | 10.1007/s11664-999-0123-x |