دورية أكاديمية
The evolution of the ion implantation damage in device processing
| العنوان: | The evolution of the ion implantation damage in device processing |
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| المؤلفون: | Polignano, M. L., Mica, I., Bontempo, V., Cazzaniga, F., Mariani, M., Mauri, A., Pavia, G., Sammiceli, F., Spoldi, G. |
| المصدر: | Journal of Materials Science: Materials in Electronics. December 2008 19(1):182-188 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 09574522 1573482X |
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| DOI: | 10.1007/s10854-008-9630-4 |