دورية أكاديمية
Raman Shift of Surface Reaction and Plasma Induced Surface Damage by TNF3/BNF3 Reactive Ion Etching Process
العنوان: | Raman Shift of Surface Reaction and Plasma Induced Surface Damage by TNF |
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المؤلفون: | Shim, Ho Jae, Kim, Jin Seok, Ahn, Da Won, Choe, Jin Hyun, Jung, Eunsu, Oh, Donghyuk, Kim, Kyung Soo, Lee, Sung ChulAff2, IDs1339102200341z_cor8, Pyo, Sung GyuAff1, IDs1339102200341z_cor9 |
المصدر: | Electronic Materials Letters. 18(3):321-329 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 17388090 20936788 |
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DOI: | 10.1007/s13391-022-00341-z |