دورية أكاديمية
Probe and Spectral Diagnostics of the Plasma of the BCl3–Cl2 Gas Medium
| العنوان: | Probe and Spectral Diagnostics of the Plasma of the BCl |
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| المؤلفون: | Murin, D. B.Aff1, IDS1063739723700701_cor1, Chesnokov, I. A., Gogulev, I. A., Grishkov, A. E. |
| المصدر: | Russian Microelectronics. 52(6):469-474 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 10637397 16083415 |
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| DOI: | 10.1134/s1063739723700701 |