دورية أكاديمية
Dual Optical Measurement Probe System for Double-Sided Film Structure
العنوان: | Dual Optical Measurement Probe System for Double-Sided Film Structure |
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المؤلفون: | Kwon, Uihyeok, Joo, Ki-NamAff1, IDs12541022006907_cor2 |
المصدر: | International Journal of Precision Engineering and Manufacturing. 23(10):1123-1131 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 22347593 20054602 |
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DOI: | 10.1007/s12541-022-00690-7 |