دورية أكاديمية
On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures
العنوان: | On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures |
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المؤلفون: | Sahoo, Pankaj K.Aff1, Aff2, IDs4159802458842w_cor1, Coates, Eve, Silver, Callum D., Li, Kezheng, Krauss, Thomas F. |
المصدر: | Scientific Reports. 14(1) |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 20452322 |
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DOI: | 10.1038/s41598-024-58842-w |