دورية أكاديمية
Sputtering of Ag (111) nanotwinned films on Si (100) wafers for backside metallization of power devices
العنوان: | Sputtering of Ag (111) nanotwinned films on Si (100) wafers for backside metallization of power devices |
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المؤلفون: | Wu, Po-Ching, Lai, Yu-Chang, Lee, Pei-Ing, Chiang, Meng-TingAff1, Aff2, Chou, Justin, Chuang, Tung-HanAff1 |
المصدر: | Journal of Materials Science: Materials in Electronics. 32(6):7319-7329 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 09574522 1573482X |
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DOI: | 10.1007/s10854-021-05442-3 |