دورية أكاديمية
Study on the Oxidant Effect for Nitrogen Trifluoride Abatement by Using a 2.45 GHz Microwave Plasma Torch
| العنوان: | Study on the Oxidant Effect for Nitrogen Trifluoride Abatement by Using a 2.45 GHz Microwave Plasma Torch |
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| المؤلفون: | Kim, Ji HunAff1, Cho, Chang Hyun |
| المصدر: | Journal of the Korean Physical Society. 76(10):895-898 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 03744884 19768524 |
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| DOI: | 10.3938/jkps.76.895 |