دورية أكاديمية
Study on the Oxidant Effect for Nitrogen Trifluoride Abatement by Using a 2.45 GHz Microwave Plasma Torch
العنوان: | Study on the Oxidant Effect for Nitrogen Trifluoride Abatement by Using a 2.45 GHz Microwave Plasma Torch |
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المؤلفون: | Kim, Ji HunAff1, Cho, Chang Hyun |
المصدر: | Journal of the Korean Physical Society. 76(10):895-898 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 03744884 19768524 |
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DOI: | 10.3938/jkps.76.895 |