دورية أكاديمية
Pressure Dependence on the Electrical Properties of SiO2 Gate Oxide Formed by Inductive Coupled Plasma Oxidation
| العنوان: | Pressure Dependence on the Electrical Properties of SiO |
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| المؤلفون: | Kim, Beom-jong, Kim, Dong-chan, Kim., Yoon-jae, Lim, Han-jin, Kim, Ju-eun, Yi, Wook-yeol, Kim, Dae-hyun, Kim, Bong-hyun, Kim, Young-wan, Kang, Sung-ho, Kim, Yung-seok, Lee, Woo-jun, Nam, Seok-woo, Chung, Chil-hee |
| المصدر: | MRS Online Proceedings Library. 1287(1) |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. | تدمد: | 02729172 19464274 |
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| DOI: | 10.1557/opl.2011.1142 |