دورية أكاديمية
GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H2 + CH4 + Ar MIXTURE ACTIVATED IN A MICROWAVE DISCHARGE
العنوان: | GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H |
---|---|
المؤلفون: | Emelyanov, A. A., Plotnilkov, M. Yu.Aff4, IDS0021894423050024_cor2, Timoshenko, N. I., Yudin, I. B. |
المصدر: | Journal of Applied Mechanics and Technical Physics. 64(5):748-756 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 00218944 15738620 |
---|---|
DOI: | 10.1134/s0021894423050024 |