دورية أكاديمية
Analysis of Layer Composition Formed on Stainless Steel Substrates upon Chemical Vapor Deposition of Tantalum
| العنوان: | Analysis of Layer Composition Formed on Stainless Steel Substrates upon Chemical Vapor Deposition of Tantalum |
|---|---|
| المؤلفون: | Sapegina, I. V.Aff1, Goncharov, O. Yu.Aff1, Ladyanov, V. I.Aff1 |
| المصدر: | Inorganic Materials: Applied Research. 12(3):731-734 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 20751133 2075115X |
|---|---|
| DOI: | 10.1134/s2075113321030333 |