دورية أكاديمية
Effect of Magnetron Sputtering Power on ITO Film Deposition at Room Temperature
| العنوان: | Effect of Magnetron Sputtering Power on ITO Film Deposition at Room Temperature |
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| المؤلفون: | Saenko, A. V.Aff1, IDS1063739723700452_cor1, Vakulov, Z. E., Klimin, V. S., Bilyk, G. E., Malyukov, S. P. |
| المصدر: | Russian Microelectronics. 52(4):297-302 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 10637397 16083415 |
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| DOI: | 10.1134/s1063739723700452 |