دورية أكاديمية
Roles of overlapped scratching in grating fabrications assisted by selective wet etching
العنوان: | Roles of overlapped scratching in grating fabrications assisted by selective wet etching |
---|---|
المؤلفون: | He, Wang, Lin, Yu, Cui, Licong, Chen, Tingting, Qian, Linmao, Yu, BingjunAff1, IDs10853023090104_cor6 |
المصدر: | Journal of Materials Science. 58(40):15647-15659 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 00222461 15734803 |
---|---|
DOI: | 10.1007/s10853-023-09010-4 |