دورية أكاديمية
Pattern induced convex corner undercutting of oriented silicon microridges in potassium hydroxide
| العنوان: | Pattern induced convex corner undercutting of oriented silicon microridges in potassium hydroxide |
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| المؤلفون: | Inayat, S. B., Ombaba, M., Islam, M. Saif |
| المصدر: | Microsystem Technologies: Micro- and NanosystemsInformation Storage and Processing Systems. January 2017 23(1):75-80 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 09467076 14321858 |
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| DOI: | 10.1007/s00542-015-2684-3 |