دورية أكاديمية
Electrical Characterization of Slurry Particles and their Interactions with Wafer Surfaces
| العنوان: | Electrical Characterization of Slurry Particles and their Interactions with Wafer Surfaces |
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| المؤلفون: | Park, Jin-Goo, Lee, Sang-Ho, Kim, Hyoung-Gyun, Jeong, Hea-Do, Moon, Doo-Kyung |
| المصدر: | MRS Online Proceedings Library. 566(1):173-178 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. | تدمد: | 02729172 19464274 |
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| DOI: | 10.1557/proc-566-173 |