دورية أكاديمية
Effect of carbon on thermal oxidation of silicon and electrical properties of SiO2-Si structures
| العنوان: | Effect of carbon on thermal oxidation of silicon and electrical properties of SiO |
|---|---|
| المؤلفون: | Beck, R. B., Brozek, T., Ruzyllo, J., Hossain, S. D., Tressler, R. E. |
| المصدر: | Journal of Electronic Materials. June 1993 22(6):689-694 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 03615235 1543186X |
|---|---|
| DOI: | 10.1007/bf02666419 |