دورية أكاديمية
Origins of Ultrafast Pulse Laser-Induced Nano Straight Lines with Potential Applications in Detecting Subsurface Defects in Silicon Carbide Wafers
العنوان: | Origins of Ultrafast Pulse Laser-Induced Nano Straight Lines with Potential Applications in Detecting Subsurface Defects in Silicon Carbide Wafers |
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المؤلفون: | Shu, Tan, Liu, Feng, Chen, Shuai, Liu, Xingtao, Zhang, ChenAff1, IDs4187102200133x_cor5, Cheng, Gary J.Aff3, IDs4187102200133x_cor6 |
المصدر: | Nanomanufacturing and Metrology. 5(2):167-178 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 2520811X 25208128 |
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DOI: | 10.1007/s41871-022-00133-x |