دورية أكاديمية
Effects of ratio of hydrogen flow on microstructure of hydrogenated microcrystalline silicon films deposited by magnetron sputtering at 100 °C
| العنوان: | Effects of ratio of hydrogen flow on microstructure of hydrogenated microcrystalline silicon films deposited by magnetron sputtering at 100 °C |
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| Alternate Title: | 氢稀释比对磁控溅射低温(100 °C)沉积氢化微晶硅薄膜微结构特性的影响 |
| المؤلفون: | Wang, Lin-qingAff1, Aff2, Zhou, Yong-taoAff3, Aff4, Wang, Jun-junAff3, Aff4, Liu, Xue-qinAff3, Aff4 |
| المصدر: | Journal of Central South University: Science & Technology of Mining and Metallurgy. 26(10):2661-2667 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 20952899 22275223 |
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| DOI: | 10.1007/s11771-019-4203-7 |