دورية أكاديمية
Stress Metrology: The challenge for the next generation of engineered wafers
| العنوان: | Stress Metrology: The challenge for the next generation of engineered wafers |
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| المؤلفون: | Tiberj, Antoine, Paillard, Vincent, Aulnette, Cécile, Daval, Nicolas, Bourdelle, Konstantin K., Moreau, Myriam, Kennard, Mark, Cayrefourcq, Ian |
| المصدر: | MRS Online Proceedings Library. 809(1) |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. | تدمد: | 02729172 19464274 |
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| DOI: | 10.1557/proc-809-b3.1 |