دورية أكاديمية
Redistribution of deep selenium and sulfur impurities in silicon upon surface doping with phosphorus
| العنوان: | Redistribution of deep selenium and sulfur impurities in silicon upon surface doping with phosphorus |
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| المؤلفون: | Astrov, Yu. A., Kozlov, V. A., Lodygin, A. N., Portsel, L. M., Shuman, V. B., Gurevich, E. L., Hergenröder, R. |
| المصدر: | Semiconductors. June 2009 43(6):710-715 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 10637826 10906479 |
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| DOI: | 10.1134/s1063782609060049 |