دورية أكاديمية
Depth-resolved impact of integration process on porosity and solvent diffusion in a SiOCH low-k material
| العنوان: | Depth-resolved impact of integration process on porosity and solvent diffusion in a SiOCH low-k material |
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| المؤلفون: | Lépinay, M., Djourelov, N., Marinov, H., Broussous, L., Courouble, K., Licitra, C., Bertin, F., Rouessac, V., Ayral, A. |
| المصدر: | Journal of Porous Materials. August 2014 21(4):475-484 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 13802224 15734854 |
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| DOI: | 10.1007/s10934-014-9794-7 |