دورية أكاديمية
Impact of rapid thermal annealing on impurities removal efficiency from silicon carbide for optoelectronic applications
العنوان: | Impact of rapid thermal annealing on impurities removal efficiency from silicon carbide for optoelectronic applications |
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المؤلفون: | Barbouche, M.Aff1, Zaghouani, R. Benabderrahmane, Benammar, N.E., Khirouni, K., Turan, R., Ezzaouia, H. |
المصدر: | The International Journal of Advanced Manufacturing Technology. 106(1-2):731-739 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 02683768 14333015 |
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DOI: | 10.1007/s00170-019-04556-7 |