دورية أكاديمية
Analysis of Low-k Organosilicon and Low-Density Silica Films Deposited in HMDSO Plasmas
| العنوان: | Analysis of Low-k Organosilicon and Low-Density Silica Films Deposited in HMDSO Plasmas |
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| المؤلفون: | Borvon, G., Goullet, A., Granier, A., Turban, G. |
| المصدر: | Plasmas and Polymers. December 2002 7(4):341-352 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 10840184 15728978 |
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| DOI: | 10.1023/a:1021381003259 |