دورية أكاديمية
Microwave Plasma Etching Treatment for Single Crystal Diamond
العنوان: | Microwave Plasma Etching Treatment for Single Crystal Diamond |
---|---|
المؤلفون: | Han, XiaotongAff1, Aff2, Peng, YanAff1, Aff2, IDs1166402209735z_cor2, Wang, Xiwei, Duan, Peng, Hu, Xiufei, Yang, Yiqiu, Li, Bin, Xu, XiangangAff1, Aff2, IDs1166402209735z_cor8, Hu, XiaoboAff1, Aff2, Wang, Dufu |
المصدر: | Journal of Electronic Materials. 51(9):4995-5004 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 03615235 1543186X |
---|---|
DOI: | 10.1007/s11664-022-09735-z |