دورية أكاديمية
Structural and Chemical Characterization of Tungsten Gate Stack for 1 Gb Dram
| العنوان: | Structural and Chemical Characterization of Tungsten Gate Stack for 1 Gb Dram |
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| المؤلفون: | Gluschenkov, O., Benedict, J., Clevenger, L. A., DeHaven, P., Dziobkowski, C., Faltermeier, J., Lin, C., McStay, I., Wong, K. |
| المصدر: | MRS Online Proceedings Library. 611(1) |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. | تدمد: | 02729172 19464274 |
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| DOI: | 10.1557/proc-611-c3.3.1 |