دورية أكاديمية
Сomposition Depth Profiling of the GaAs Native Oxide Irradiated by an Ar+ Ion Beam
العنوان: | Сomposition Depth Profiling of the GaAs Native Oxide Irradiated by an Ar+ Ion Beam |
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المؤلفون: | Mikoushkin, V. M.Aff1, Bryzgalov, V. V., Makarevskaya, E. A., Solonitsyna, A. P., Marchenko, D.E. |
المصدر: | Semiconductors. 52(16):2057-2060 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 10637826 10906479 |
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DOI: | 10.1134/s1063782618160194 |