دورية أكاديمية
Scalable and efficient grating couplers on low-index photonic platforms enabled by cryogenic deep silicon etching
العنوان: | Scalable and efficient grating couplers on low-index photonic platforms enabled by cryogenic deep silicon etching |
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المؤلفون: | Lomonte, EmmaAff1, Aff2, Aff3, Stappers, MaikAff1, Aff2, Aff3, Krämer, LinusAff1, Aff2, Aff3, Aff4, Pernice, Wolfram H. P.Aff1, Aff2, Aff3, Aff4, IDs41598024539754_cor4, Lenzini, FrancescoAff1, Aff2, Aff3, IDs41598024539754_cor5 |
المصدر: | Scientific Reports. 14(1) |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 20452322 |
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DOI: | 10.1038/s41598-024-53975-4 |