دورية أكاديمية
Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering
| العنوان: | Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering |
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| المؤلفون: | Fu, YuweiAff1, IDs11090023104259_cor1, Ji, Peng, He, Mengsha, Huang, Peijun, Huang, Guobin, Huang, Weihua |
| المصدر: | Plasma Chemistry and Plasma Processing. 44(1):601-619 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 02724324 15728986 |
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| DOI: | 10.1007/s11090-023-10425-9 |