دورية أكاديمية
Application of RIE-Technology to Control Responsivity of 4H-SiC Photodiodes
| العنوان: | Application of RIE-Technology to Control Responsivity of 4H-SiC Photodiodes |
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| المؤلفون: | Afanasev, A. V.Aff1, IDS1063782623080018_cor1, Zabrodskiy, V. V., Ilyin, V. A., Luchinin, V. V., Nikolaev, A. V., Serkov, A. V., Trushlyakova, V. V., Chigirev, D. A. |
| المصدر: | Semiconductors. 57(11):469-473 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 10637826 10906479 |
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| DOI: | 10.1134/s1063782623080018 |