دورية أكاديمية
Study of black silicon obtained by cryogenic plasma etching: approach to achieve the hot spot of a thermoelectric energy harvester
العنوان: | Study of black silicon obtained by cryogenic plasma etching: approach to achieve the hot spot of a thermoelectric energy harvester |
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المؤلفون: | Nguyen, K. N., Abi-Saab, D., Basset, P., Richalot, E., Malak, M., Pavy, N., Flourens, F., Marty, F., Angelescu, D., Leprince-Wang, Y., Bourouina, T. |
المصدر: | Microsystem Technologies: Micro- and NanosystemsInformation Storage and Processing Systems. November 2012 18(11):1807-1814 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 09467076 14321858 |
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DOI: | 10.1007/s00542-012-1486-0 |