دورية أكاديمية
Adhesion of Electron-Irradiated Diazoquinone–Novolac Photoresist Films to Single-Crystal Silicon
| العنوان: | Adhesion of Electron-Irradiated Diazoquinone–Novolac Photoresist Films to Single-Crystal Silicon |
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| المؤلفون: | Vabishchevich, S. A., Vabishchevich, N. V., Brinkevich, S. D.Aff2, Aff3, Brinkevich, D. I.Aff2, IDS001814392401017X_cor4, Prosolovich, V. S., Lastovskii, S. B. |
| المصدر: | High Energy Chemistry. 58(1):112-119 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 00181439 16083148 |
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| DOI: | 10.1134/s001814392401017x |