دورية أكاديمية
Substrate temperature estimation and control in advanced MOCVD process for superconductor manufacturing
العنوان: | Substrate temperature estimation and control in advanced MOCVD process for superconductor manufacturing |
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المؤلفون: | Chebbi, AmalAff1, IDs00170024136991_cor1, Grigoriadis, KarolosAff1, Aff2, Franchek, MatthewAff1, Aff2, Cescon, MarziaAff1, Aff2 |
المصدر: | The International Journal of Advanced Manufacturing Technology. 133(1-2):273-285 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 02683768 14333015 |
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DOI: | 10.1007/s00170-024-13699-1 |