دورية أكاديمية
Single Shot Line Profile Measurement of Multi-layered Film Thicknesses
| العنوان: | Single Shot Line Profile Measurement of Multi-layered Film Thicknesses |
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| المؤلفون: | Kim, Jin Sub, Park, Hyo Mi, Joo, Ki-NamAff1 |
| المصدر: | International Journal of Precision Engineering and Manufacturing. 21(11):2089-2094 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 22347593 20054602 |
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| DOI: | 10.1007/s12541-020-00410-z |