دورية أكاديمية
Specific contact resistivity reduction in amorphous IGZO thin-film transistors through a TiN/IGTO heterogeneous interlayer
العنوان: | Specific contact resistivity reduction in amorphous IGZO thin-film transistors through a TiN/IGTO heterogeneous interlayer |
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المؤلفون: | Jeong, Joo Hee, Seo, Seung Wan, Kim, Dongseon, Yoon, Seong Hun, Lee, Seung Hee, Kuh, Bong Jin, Kim, TaikyuAff3, IDs41598024618372_cor7, Jeong, Jae KyeongAff1, IDs41598024618372_cor8 |
المصدر: | Scientific Reports. 14(1) |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 20452322 |
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DOI: | 10.1038/s41598-024-61837-2 |