دورية أكاديمية
X-Ray Reflectometry Study of the State of the Surface Layer of Polished Silicon Substrates Depending on the Methods of Their Cleaning
| العنوان: | X-Ray Reflectometry Study of the State of the Surface Layer of Polished Silicon Substrates Depending on the Methods of Their Cleaning |
|---|---|
| المؤلفون: | Volkovsky, Yu. A.Aff1, Aff2, Seregin, A. Yu.Aff1, Aff2, Folomeshkin, M. S.Aff1, Aff2, Prosekov, P. A.Aff1, Aff2, Pavlyuk, M. D., Pisarevsky, Yu. V.Aff1, Aff2, Blagov, A. E.Aff1, Aff2, Kovalchuk, M. V.Aff1, Aff2, Aff3 |
| المصدر: | Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 15(5):927-933 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 10274510 18197094 |
|---|---|
| DOI: | 10.1134/s1027451021050207 |