دورية أكاديمية
Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams
| العنوان: | Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams |
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| المؤلفون: | Yu, MingzhiAff1, Aff2, Zhao, LiboAff1, Aff2, Aff3, Chen, ShanshanAff1, Aff2, IDs4137802200474z_cor3, Han, XiangguangAff1, Aff2, Aff3, Jia, ChenAff1, Aff2, IDs4137802200474z_cor5, Xia, YongAff1, Aff2, Wang, XiaozhangAff1, Aff2, Aff3, Wang, YongluAff1, Aff2, Yang, PingAff1, Aff2, Aff3, Lu, DejiangAff1, Aff2, Aff3, Jiang, ZhuangdeAff1, Aff2, Aff3 |
| المصدر: | Microsystems & Nanoengineering. 9(1) |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 20557434 |
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| DOI: | 10.1038/s41378-022-00474-z |