دورية أكاديمية
Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process
العنوان: | Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process |
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المؤلفون: | Grixti, Ryan, Grech, Ivan, Casha, Owen, Darmanin, Jean Marie, Gatt, Edward, Micallef, Joseph |
المصدر: | Analog Integrated Circuits and Signal Processing: An International Journal. March 2015 82(3):599-610 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 09251030 15731979 |
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DOI: | 10.1007/s10470-014-0484-9 |