دورية أكاديمية
Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process
| العنوان: | Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process |
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| المؤلفون: | Grixti, Ryan, Grech, Ivan, Casha, Owen, Darmanin, Jean Marie, Gatt, Edward, Micallef, Joseph |
| المصدر: | Analog Integrated Circuits and Signal Processing: An International Journal. March 2015 82(3):599-610 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 09251030 15731979 |
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| DOI: | 10.1007/s10470-014-0484-9 |