دورية أكاديمية
Compression and strong rarefaction in high power impulse magnetron sputtering discharges
| العنوان: | Compression and strong rarefaction in high power impulse magnetron sputtering discharges |
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| المساهمون: | Anders, Andre |
| المصدر: | Journal of Applied Physics |
| وصف الملف: | Medium: ED; Size: 15 |
| URL الوصول: | http://www.osti.gov/scitech/servlets/purl/1001045 |
| قاعدة البيانات: | SciTech Connect |
Find this article in full text from Scitation. | تدمد: | 00218979 |
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| DOI: | 10.1063/1.3525986 |