التفاصيل البيبلوغرافية
| العنوان: |
Scaling of high-k dielectrics towards sub-Inm EOT |
| المؤلفون: |
Heyns, M, Beck, S, Bender, H, Blomme, P, Boullart, W, Brijs, B, Carter, R, Caymax, M, Clues, M, Conard, T, De Gendt, S, Degraeve, R, Delabie, A, Deweerdt, W, Groeseneken, G, Henson, K, Kauerauf, T, Kubicck, S, Lucci, L, Lujan, G, Mentens, J, Pantisano, L, Petry, J, Richard, O, Rohr, E, Schram, T, Vandervvorst, W, van Doome, P, van Eishocht, S, Wetslinder, Jörgen, Witters, T, Zhao, C, Carter, E, Chen, J, Cosnier, V, Green, M, Jang, S E, Kaushik, V, Kerber, A, Kluth, J, Lin, S, Tsai, W, Young, E, Manabe, Y, Shimamoto, Y, Bajolet, P, de Witte, H, Maes, J W, Date, L, Pique, D, Coenergrachts, B, Vertommen, J, Passefort, S |
| المصدر: |
Proceedings of International Symposium on VLSI Technology, Systems, and Applications. :247-250 |
| مصطلحات موضوعية: |
TECHNOLOGY, Electrical engineering, electronics and photonics, Electronics, TEKNIKVETENSKAP, Elektroteknik, elektronik och fotonik, Elektronik |
| وصف الملف: |
print |
| URL الوصول: |
https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-46460 |
| قاعدة البيانات: |
SwePub |
